Home » Photomask and X-Ray Mask Technology V: 9-10 April, 1998, Kawasaki, Japan by Naoaki Aizaki
Photomask and X-Ray Mask Technology V: 9-10 April, 1998, Kawasaki, Japan Naoaki Aizaki

Photomask and X-Ray Mask Technology V: 9-10 April, 1998, Kawasaki, Japan

Naoaki Aizaki

Published September 1st 1998
ISBN : 9780819428646
Hardcover
616 pages
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 About the Book 

An overview of photomask and X-ray mask technology. The papers are divided into sections which explore topics such as: device trends- equipment- X-ray masks- and advanced mask fabrication processes.